OHIO UNIVERSITY

$320,000

from National Science Foundation

UV RADIATION-ASSISTED ELECTRON BEAM LITHOGRAPHY WITH IN SITU SINGLET OXYGEN RESIST DEVELOPMENT FOR PATTERNING SUB-5 NM FEATURES -THIS GRANT SUPPORTS RESEARCH AIMED AT ADVANCING PATTERNING TECHNOLOGY AT THE NANOMETER SCALE BY AUGMENTING THE WIDELY USED TECHNIQUE OF ELECTRON BEAM LITHOGRAPHY. THE CENTRAL ASPECT OF THIS PROJECT IS TO USE A SUPER-FINE ELECTRON BEAM AS A PATTERNING TOOL TO FABRICATE...
Description as recorded in the federal award record (cut at 400 characters).

Award ID: 2534141
Award type: PROJECT GRANT (B)
First obligated: Aug 20, 2026
Period starts: Sep 1, 2026
Place of performance: Athens County, Ohio 45701
Assistance listing: 47.041 ENGINEERING
Amount means: Federal obligation for this grant, as of our last read Oct 13, 2026.

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